Semiconductors

As microchip technology advances toward smaller micron sizing and as wafer diameters become larger, the risk of defects and quality rejection becomes even more of a concern as high percentage yields offer competitive advantage. Hanovia provides UV equipment to meet these higher demands for proven reliability, effectiveness, and performance worldwide.

The Role of UV in the semiconductor industry

Ultraviolet technology is often used in ultrapure water systems for disinfection, organics removal, deozonation, and dechlorination. Additionally, advanced oxidation processes are becoming more valuable for both incoming water and reclaim water as water quality requirements increase and water availability presents ever increasing challenges.


Bacterial control is critical after areas of microbial proliferation such as carbon filters, DI resins and storage tanks. Total Organic Carbon (TOC) reduction is achieved with special UV lamps that break down low level organics by dissociation of molecular bonds and generation of aggressive hydroxyl radicals from water molecules that break-down organic compounds. Hanovia SuperTOC medium pressure UV systems reduce the number of conventional lamps by up to 95% while reducing operating and maintenance costs by 50% or more in high volume water treatment processes.

Ozone is often used for TOC removal and for storage tank water protection, but must be removed or it will cause equipment degradation and cannot come in contact with the wafers. Medium pressure UV assures that the ozone is destroyed after discharge from the tanks without the use of chemicals or heat.

Advanced oxidation processes for reclaim and special incoming water contaminants can be a valuable tool for fabs worldwide. Special considerations are needed as each process is normally site specific.

The benefits of Hanovia UV systems

• Hanovia SuperTOC lamps are designed specifically for the semiconductor industry, helping UPW to be maintained at less than 1ppb of TOC in polished water loops.
• The PMT range is used in the majority of semiconductor plants, offering the peace of mind of a proven solution.
• Highest level of monitoring available on the market.

With over 500 worldwide, Hanovia is the leader in the semiconductor market for all UV requirments. Please contact us for more information.


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